INTEGRATION OF LOW E THIN FILMS AND Ta INTO Cu DUAL DAMASCENE

Details for Australian Patent Application No. 2002306571 (hide)

Owner DIELECTRIC SYSTEMS, INC.

Inventors LEE, Chung, J.; LEE, Chung, J.

Pub. Number AU-A-2002306571

PCT Number PCT/US02/05470

PCT Pub. Number WO2002/069395

Priority 09/795,217 26.02.01 US; 09/795,217 26.02.01 US

Filing date 22 February 2002

Wipo publication date 12 September 2002

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/312 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/795,217 26.02.01 US; 09/795,217 26.02.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002306571

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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