IMPEDANCE MONITORING SYSTEM AND METHOD

Details for Australian Patent Application No. 2002306553 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors QUON, Bill, H.

Pub. Number AU-A-2002306553

PCT Number PCT/US02/05112

PCT Pub. Number WO2002/075332

Priority 60/276,106 16.03.01 US

Filing date 14 March 2002

Wipo publication date 3 October 2002

International Classifications

G01R 027/26 Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom - Measuring inductance or capacitance

H05B 031/26 Lighting

G21B 001/00 Thermonuclear fusion reactors

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/276,106 16.03.01 US

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002306553

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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