POLISHING DISK WITH END-POINT DETECTION PORT

Details for Australian Patent Application No. 2002306506 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors SEVILLA, Roland, K.; HICKS, James, A.; JONES, Jeremy

Pub. Number AU-A-2002306506

PCT Number PCT/US02/04587

PCT Pub. Number WO2002/064315

Priority 09/788,082 14.02.01 US

Filing date 5 January 2002

Wipo publication date 28 August 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 013/12 Wheels having flexibly-acting working parts, e.g. buffing wheels

B24D 013/14 Wheels having flexibly-acting working parts, e.g. buffing wheels

B24D 007/12 Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face

B24B 049/04 Measuring

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/788,082 14.02.01 US

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002306506

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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