USE OF FLUORINATED KETONES AS WET CLEANING AGENTS FOR VAPOR REACTORS

Details for Australian Patent Application No. 2002306466 (hide)

Owner 3M INNOVATIVE PROPERTIES COMPANY

Inventors KESARI, Susrut

Pub. Number AU-A-2002306466

PCT Number PCT/US02/04087

PCT Pub. Number WO2002/086191

Priority 09/841,340 24.04.01 US

Filing date 12 February 2002

Wipo publication date 5 November 2002

International Classifications

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

C23G 005/032 Cleaning or de-greasing metallic material by other methods

C11D 011/00 Special methods for preparing compositions containing mixtures of detergents

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/841,340 24.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306466

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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