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Details for Australian Patent Application No. 2002306436 (hide)

Owner ASM AMERICA, INC.

Inventors TODD, Michael, A.; HAWKINS, Mark, R.

Pub. Number AU-A-2002306436

PCT Number PCT/US02/02921

PCT Pub. Number WO2002/080244

Priority 60/323,649 19.09.01 US; 60/332,696 13.11.01 US; 60/333,724 28.11.01 US; 60/340,454 07.12.01 US; 60/268,337 12.02.01 US; 60/279,256 27.03.01 US; 60/311,609 09.08.01 US

Filing date 1 February 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 031/18 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation - Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof

H01L 031/20 Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength, or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/323,649 19.09.01 US; 60/332,696 13.11.01 US; 60/333,724 28.11.01 US; 60/340,454 07.12.01 US; 60/268,337 12.02.01 US; 60/279,256 27.03.01 US; 60/311,609 09.08.01 US

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002306436

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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