SYSTEMS AND METHODS FOR INSPECTION OF SPECIMEN SURFACES

Details for Australian Patent Application No. 2002306430 (hide)

Owner KLA-TENCOR, INC.

Inventors ROSENGAUS, Eliezer; YOUNG, Lydia, J.

Pub. Number AU-A-2002306430

PCT Number PCT/US02/02555

PCT Pub. Number WO2002/073173

Priority 60/264,979 29.01.01 US; 60/297,221 08.06.01 US; 09/965,408 25.09.01 US

Filing date 29 January 2002

Wipo publication date 24 September 2002

International Classifications

G01N 021/88 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating the presence of flaws, defects or contamination

G01N 021/95 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/264,979 29.01.01 US; 60/297,221 08.06.01 US; 09/965,408 25.09.01 US

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002306430

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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