SCANNING EXPOSURE METHOD AND SCANNING EXPOSURE SYSTEM, AND DEVICE PRODUCTION METHOD

Details for Australian Patent Application No. 2002306330 (hide)

Owner NIKON CORPORATION

Inventors HAGIWARA, Shigeru; KURITA, Shinichi

Pub. Number AU-A-2002306330

PCT Number PCT/JP02/05877

PCT Pub. Number WO2002/103766

Priority 2001-177878 13.06.01 JP

Filing date 13 June 2002

Wipo publication date 2 January 2003

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 2001-177878 13.06.01 JP

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002306330

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002306331-FORM CORRECTING PAD WITH IMPROVED FEELING OF WEARING AND METHOD OF MANUFACTURING THE PAD

2002306329-Aqueous cilostazol preparation for injection