LOCALLY INCREASING SIDEWALL DENSITY BY ION IMPLANTATION

Details for Australian Patent Application No. 2002306163 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors APELGREN, Eric, M.; ZISLT, Christian; MARTIN, Jeremy, I.; BESSER, Paul, R.; CHEUNG, Fred

Pub. Number AU-A-2002306163

PCT Number PCT/US02/18842

PCT Pub. Number WO2003/007367

Priority 09/902,024 10.07.01 US

Filing date 12 June 2002

Wipo publication date 29 January 2003

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/902,024 10.07.01 US

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002306163

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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