REEL-TO-REEL SUBSTRATE TAPE POLISHING SYSTEM

Details for Australian Patent Application No. 2002305946 (hide)

Owner IGC-SUPERPOWER, LLC

Inventors QIAO, Yunfei; SELVAMANICKAM, Venkat; GARDNER, Michael, T.; JUDD, Raymond, D.; WELOTH, Martin, A.

Pub. Number AU-A-2002305946

PCT Number PCT/US02/06270

PCT Pub. Number WO2002/070194

Priority 60/273,195 02.03.01 US

Filing date 4 March 2002

Wipo publication date 19 September 2002

International Classifications

B24B 001/00

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

B24B 007/06 Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces

B24B 051/00 Arrangements for automatic control of a series of individual steps in grinding a workpiece

B24B 007/00 Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces

B24C 003/08 Abrasive blasting machines or devices

B24C 003/32 Abrasive blasting machines or devices

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 60/273,195 02.03.01 US

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002305946

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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