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Details for Australian Patent Application No. 2002305943 (hide)

Owner CYMER, INC.

Inventors RULE, John, A.; LUBLIN, Leonard; WARKENTIN, David, J.; PLETNER, Baruch

Pub. Number AU-A-2002305943

PCT Number PCT/US02/06249

PCT Pub. Number WO2002/088687

Priority 09/803,320 09.03.01 US; 60/338,592 30.11.01 US; 10/074,059 11.02.02 US

Filing date 1 March 2002

Wipo publication date 11 November 2002

International Classifications

G01N 021/86 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating moving sheets

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/803,320 09.03.01 US; 60/338,592 30.11.01 US; 10/074,059 11.02.02 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002305943

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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