METHOD OF FORMING VARIABLE OXIDE THICKNESSES ACROSS SEMICONDUCTOR CHIPS

Details for Australian Patent Application No. 2002305829 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors OKORN-SCHMIDT, Harald, F.; IYER, Kumar, Sundar, S.; HEGDE, Suryanarayan, G.; JONES, Erin, Catherine

Pub. Number AU-A-2002305829

PCT Number PCT/US02/17740

PCT Pub. Number WO2002/101823

Priority 09/878,556 11.06.01 US

Filing date 31 May 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/8234 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/878,556 11.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002305829

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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