RESIST COMPOSITIONS WITH POLYMERS HAVING PENDANT GROUPS CONTAINING PLURAL ACID LABILE MOIETIES

Details for Australian Patent Application No. 2002305222 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors PUSHKARA, Rao, Varanasi; LAWSON, Margaret, C.; LI, Wenjie

Pub. Number AU-A-2002305222

PCT Number PCT/US02/12885

PCT Pub. Number WO2002/088077

Priority 09/844,848 27.04.01 US

Filing date 22 April 2002

Wipo publication date 11 November 2002

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/844,848 27.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002305222

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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