APPARATUS AND METHOD FOR SEQUENTIALLY POLISHING AND LOADING/UNLOADING SEMICONDUCTOR WAFERS

Details for Australian Patent Application No. 2002305203 (hide)

Owner ORIOL, INC.

Inventors JEONG, In-Kwon

Pub. Number AU-A-2002305203

PCT Number PCT/US02/12328

PCT Pub. Number WO2002/085571

Priority 09/839,508 20.04.01 US

Filing date 19 April 2002

Wipo publication date 5 November 2002

International Classifications

B24B 049/00 Measuring

B24B 005/00 Grinding surfaces of particular forms

B24B 019/00 Single purpose machines or devices for particular grinding operations not covered by any other main group

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

B24B 001/00

B24B 029/00 Polishing surfaces

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 09/839,508 20.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002305203

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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