APPARATUS FOR THE DEPOSITION OF METAL OR METAL OXIDE COATINGS

Details for Australian Patent Application No. 2002304665 (hide)

Owner N.V. BEKAERT S.A.

Inventors DE GRYSE, Roger; SEGERS, Anneke; LIEVENS, Hugo; DENUL, Jurgen

Pub. Number AU-A-2002304665

PCT Number PCT/EP02/04243

PCT Pub. Number WO2002/086187

Priority 01201428.8 20.04.01 EP

Filing date 17 April 2002

Wipo publication date 5 November 2002

International Classifications

C23C 014/50 Coating by vacuum evaporation, by sputtering or by ion implantation - Substrate holders

C23C 014/54 Coating by vacuum evaporation, by sputtering or by ion implantation - Controlling or regulating the coating process

C23C 014/56 Coating by vacuum evaporation, by sputtering or by ion implantation - Apparatus specially adapted for continuous coating

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 016/46 Chemical deposition or plating by decomposition - characterised by the method used for heating the substrate

H01L 039/24 Devices using superconductivity or hyperconductivity - Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in group or of parts thereof

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 01201428.8 20.04.01 EP

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002304665

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002304666-MODULAR AND RECONFIGURABLE PARALLEL KINEMATIC ROBOT

2002304664-PROCESS FOR THE POLYMERIZATION OF POLYVINYLCHLORIDE