HIGH-RESOLUTION ELLIPSOMETRY METHOD FOR QUANTITATIVE OR QUALITATIVE ANALYSIS OF SAMPLE VARIATIONS, BIOCHIP AND MEASURING DEVICE

Details for Australian Patent Application No. 2002304653 (hide)

Owner INSTITUT FUR MIKROTECHNIK MAINZ GMBH

Inventors WESTPHAL, Peter; EBERHARDT, Matthias

Pub. Number AU-A-2002304653

PCT Number PCT/EP02/05895

PCT Pub. Number WO2002/097405

Priority 101 26 152.7 30.05.01 DE

Filing date 29 May 2002

Wipo publication date 9 December 2002

International Classifications

G01N 021/55 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Specular reflectivity

G01N 021/21 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Polarisation-affecting properties

Event Publications

19 December 2002 Complete Application Filed

  Priority application(s): 101 26 152.7 30.05.01 DE

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002304653

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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