METHOD OF PRODUCING III NITRIDE COMPOUND SEMICONDUCTOR

Details for Australian Patent Application No. 2002304158 (hide)

Owner TOYODA GOSEI CO., LTD.

Inventors ASAI, Makoto; KANEYAMA, Naoki; SAWAZAKI, Katsuhisa; KATO, Hisaki

Pub. Number AU-A-2002304158

PCT Number PCT/JP02/05446

PCT Pub. Number WO2002/099859

Priority 2002-147130 22.05.02 JP; 2001-168015 04.06.01 JP; 2001-168016 04.06.01 JP

Filing date 3 June 2002

Wipo publication date 16 December 2002

International Classifications

H01L 021/205 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 2002-147130 22.05.02 JP; 2001-168015 04.06.01 JP; 2001-168016 04.06.01 JP

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002304158

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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