METHOD FOR REPAIRING FINE PATTERN AND APPARATUS FOR REPAIRING FINE PATTERN

Details for Australian Patent Application No. 2002304123 (hide)

Owner HYPER PHOTON SYSTEMS, INC.

Inventors KIUCHI, Hiroshi; NAKAMURA, Yoshimitsu

Pub. Number AU-A-2002304123

PCT Number PCT/JP02/05320

PCT Pub. Number WO2003/069023

Priority 2002-36079 14.02.02 JP

Filing date 30 May 2002

Wipo publication date 4 September 2003

International Classifications

C23C 018/08 Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating

C23C 026/00 Coating not provided for in groups

C23C 020/00 Chemical coating by decomposition of either solid compounds or suspensions of the coating forming compounds, without leaving reaction products of surface material in the coating

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 2002-36079 14.02.02 JP

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002304123

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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