Porous insulating compounds and method for making same

Details for Australian Patent Application No. 2002304021 (hide)

Owner Georgia Tech Research Corporation

Inventors Kohl, Paul A

Agent Griffith Hack

Pub. Number AU-A-2002304021

Parent 44178

Filing date 22 November 2002

Wipo publication date 20 March 2003

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002304021

8 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(a). A direction to request examination has been given for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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