THIOPHENE-CONTAINING PHOTO ACID GENERATORS FOR PHOTOLITHOGRAPHY

Details for Australian Patent Application No. 2002303983 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors VARANASI, Pushkara, Rao; CHEN, Kuang-Jung; LI, Wenjie

Pub. Number AU-A-2002303983

PCT Number PCT/US02/18036

PCT Pub. Number WO2003/003120

Priority 09/896,538 29.06.01 US

Filing date 6 June 2002

Wipo publication date 3 March 2003

International Classifications

G03F 007/004 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Photosensitive materials

G03C 005/00 Photographic processes or agents therefor

C07C 381/00 Compounds containing carbon and sulfur and having functional groups not covered by groups

C07C 315/00 Preparation of sulfones

C07C 331/00 Derivatives of thiocyanic acid or of isothiocyanic acid

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/896,538 29.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303983

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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