METHOD AND APPARATUS TO CORRECT WAFER DRIFT

Details for Australian Patent Application No. 2002303885 (hide)

Owner ASM AMERICA, INC.

Inventors LU, Zhimin

Pub. Number AU-A-2002303885

PCT Number PCT/US02/16715

PCT Pub. Number WO2002/097869

Priority 09/870,393 29.05.01 US

Filing date 28 May 2002

Wipo publication date 9 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/870,393 29.05.01 US

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303885

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002303886-Method and system for creating travel packages

2002303884-Composition containing a peptide and a pigment and the use thereof in darkening the skin