A METHOD FOR MAKING A MICROMECHANICAL DEVICE BY REMOVING A SACRIFICIAL LAYER WITH MULTIPLE SEQUENTIAL ETCHANTS

Details for Australian Patent Application No. 2002303842 (hide)

Event Publications

12 December 2002 Complete Application Filed

Priority application(s): 60/293,092 22.05.01 US

8 May 2003 Application Open to Public Inspection

Published as AU-A-2002303842

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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