LAYERED HARD MASK AND DIELECTRIC MATERIALS AND METHODS THEREFOR

Details for Australian Patent Application No. 2002303806 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors FORESTER, Lynn

Pub. Number AU-A-2002303806

PCT Number PCT/US02/15829

PCT Pub. Number WO2002/093641

Priority 09/860,993 17.05.01 US

Filing date 17 May 2002

Wipo publication date 25 November 2002

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/860,993 17.05.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303806

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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