METHOD OF REMOVING DEBRIS FROM CLEANING PADS IN WORK PIECE CLEANING EQUIPMENT

Details for Australian Patent Application No. 2002303680 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors KRUPA, Frank; HARVEY, Ellis; EPSHTEYN, Yakov

Pub. Number AU-A-2002303680

PCT Number PCT/US02/14547

PCT Pub. Number WO2002/091438

Priority 09/851,866 09.05.01 US

Filing date 7 May 2002

Wipo publication date 18 November 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/851,866 09.05.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303680

26 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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