BARRIER STRUCTURES FOR INTEGRATION OF HIGH K OXIDES WITH CU AND AI ELECTRODES

Details for Australian Patent Application No. 2002303621 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors STAUF, Gregory, T.; HENDRIX, Bryan, C.; ROEDER, Jeffrey, F.; CHEN, IngShin

Pub. Number AU-A-2002303621

PCT Number PCT/US02/14052

PCT Pub. Number WO2002/091477

Priority 09/681,609 08.05.01 US

Filing date 6 May 2002

Wipo publication date 18 November 2002

International Classifications

H01L 029/92 Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/681,609 08.05.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303621

26 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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