MICROELECTROMECHANICAL SYSTEM DEVICES INTEGRATED WITH SEMICONDUCTOR STRUCTURES

Details for Australian Patent Application No. 2002303591 (hide)

Owner MOTOROLA, INC.

Inventors HOLMES, John, E.; ESCALERA, Nestor, J.; EMRICK, Rudy, M.; ROCKWELL, Stephen, K.; BOSCO, Bruce, Allen; FRANSON, Steven, James

Pub. Number AU-A-2002303591

PCT Number PCT/US02/13846

PCT Pub. Number WO2003/010086

Priority 09/909,936 23.07.01 US

Filing date 3 May 2002

Wipo publication date 17 February 2003

International Classifications

B81B 003/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B81C 001/00 Manufacture or treatment of devices or systems in or on a substrate

B81B 007/02 Micro-structural systems

G02B 026/02 Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating - for controlling the intensity of light

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/909,936 23.07.01 US

29 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303591

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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