ORDERED TWO-PHASE DIELECTRIC FILM, AND SEMICONDUCTOR DEVICE CONTAINING THE SAME

Details for Australian Patent Application No. 2002303576 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors GATES, Stephen, McConnell; MURRAY, Christopher, B.; NITTA, Satyanarayana, V.; PURUSHOTHAMAN, Sampath

Pub. Number AU-A-2002303576

PCT Number PCT/US02/13749

PCT Pub. Number WO2002/091450

Priority 09/848,153 03.05.01 US

Filing date 30 April 2002

Wipo publication date 18 November 2002

International Classifications

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/848,153 03.05.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303576

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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