EUVL MULTILAYER STRUCTURES

Details for Australian Patent Application No. 2002303459 (hide)

Owner THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventors BARBEE, Troy, W., Jr.; BAJT, Sasa

Pub. Number AU-A-2002303459

PCT Number PCT/US02/12929

PCT Pub. Number WO2002/089149

Priority 09/847,744 01.05.01 US

Filing date 23 April 2002

Wipo publication date 11 November 2002

International Classifications

G21K 001/06 Arrangements for handling radiation or particles, e.g. focusing, moderating

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/847,744 01.05.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002303459

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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