METHOD AND APPARATUS FOR CONTROLLING A THICKNESS OF A COPPER FILM

Details for Australian Patent Application No. 2002303447 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors BUSHMAN, Scott; CHRISTIAN, Craig, William; SONDERMAN, Thomas, J.

Pub. Number AU-A-2002303447

PCT Number PCT/US02/12828

PCT Pub. Number WO2002/101817

Priority 09/880,975 13.06.01 US

Filing date 2 April 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/880,975 13.06.01 US

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303447

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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