LASER SPECTRAL ENGINEERING FOR LITHOGRAPHIC PROCESS

Details for Australian Patent Application No. 2002303412 (hide)

Owner CYMER, INC.

Inventors LALOVIC, Ivan; FOMENKOV, Igor; DAS, Palash, P.; SANDSTROM, Richard, L.; ALGOTS, John, M.; AHMED, Khurshid; KROYAN, Armen

Pub. Number AU-A-2002303412

PCT Number PCT/US02/12396

PCT Pub. Number WO2002/093700

Priority 09/854,097 11.05.01 US; 09/918,773 27.07.01 US

Filing date 19 April 2002

Wipo publication date 25 November 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/854,097 11.05.01 US; 09/918,773 27.07.01 US

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002303412

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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