METHOD OF REDUCING IN-TRENCH SMEARING DURING POLISHING

Details for Australian Patent Application No. 2002303298 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors CHERIAN, Isaac, K.; FEENEY, Paul, M.; MOEGGENBORG, Kevin, J.

Pub. Number AU-A-2002303298

PCT Number PCT/US02/11295

PCT Pub. Number WO2002/084718

Priority 60/283,422 12.04.01 US

Filing date 10 April 2002

Wipo publication date 28 October 2002

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 60/283,422 12.04.01 US

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002303298

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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