MICRO-MACHINED THIN FILM SENSOR ARRAYS FOR THE DETECTION OF H2, NH3, AND SULFUR CONTAINING GASES, AND METHOD OF MAKING AND USING THE SAME

Details for Australian Patent Application No. 2002303241 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors DiMEO, Frank, Jr.; BAUM, Thomas, H.

Pub. Number AU-A-2002303241

PCT Number PCT/US02/10598

PCT Pub. Number WO2002/082045

Priority 09/828,115 06.04.01 US

Filing date 5 April 2002

Wipo publication date 21 October 2002

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/828,115 06.04.01 US

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002303241

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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