INJECTION SEEDED LASER WITH PRECISE TIMING CONTROL

Details for Australian Patent Application No. 2002303223 (hide)

Owner CYMER, INC.

Inventors ERSHOV, Alexander, I.; NESS, Richard, M.; SANDSTROM, Richard, L.; PARTLO, William, N.

Pub. Number AU-A-2002303223

PCT Number PCT/US02/10448

PCT Pub. Number WO2002/082597

Priority 09/829,475 09.04.01 US; 09/848,043 03.05.01 US

Filing date 2 April 2002

Wipo publication date 21 October 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/097 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - by gas discharge of a gas laser

H01S 003/00 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/14 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - characterised by the material used as the active medium

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 09/829,475 09.04.01 US; 09/848,043 03.05.01 US

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002303223

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002303224-PULVERIZED SOLID FUEL NOZZLE TIP WITH CERAMIC COMPONENT

2002303222-REACTIVE OLIGOMERS