ATOMIC LAYER DEPOSITION SYSTEM AND METHOD

Details for Australian Patent Application No. 2002303195 (hide)

Owner ANGSTRON SYSTEMS, INC.

Inventors LEESER, Karl, F.; BROWN, Jeffrey, A.; BABCOKE, Jason, E.; CHIANG, Tony, P.

Pub. Number AU-A-2002303195

PCT Number PCT/US02/09999

PCT Pub. Number WO2002/081771

Priority 10/000,382 24.10.01 US; 10/000,825 24.10.01 US; 10/004,488 24.10.01 US; 10/027,592 19.12.01 US; 60/281,628 05.04.01 US; 09/902,080 09.07.01 US; 09/970,867 03.10.01 US; 09/999,499 24.10.01 US; 09/999,532 24.10.01 US; 09/999,636 24.10.01 US

Filing date 27 March 2002

Wipo publication date 21 October 2002

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 10/000,382 24.10.01 US; 10/000,825 24.10.01 US; 10/004,488 24.10.01 US; 10/027,592 19.12.01 US; 60/281,628 05.04.01 US; 09/902,080 09.07.01 US; 09/970,867 03.10.01 US; 09/999,499 24.10.01 US; 09/999,532 24.10.01 US; 09/999,636 24.10.01 US

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002303195

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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