METHOD AND DEVICE FOR GENERATING EUV RADIATION

Details for Australian Patent Application No. 2002302424 (hide)

Owner LZH LASERZENTRUM HANNOVER E.V.

Inventors CHICHKOV, Boris; EGBERT, Andre

Pub. Number AU-A-2002302424

PCT Number PCT/EP02/02772

PCT Pub. Number WO2002/076156

Priority 101 13 064.3 15.03.01 DE

Filing date 13 March 2002

Wipo publication date 3 October 2002

International Classifications

H05G 002/00 Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): 101 13 064.3 15.03.01 DE

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002302424

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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