Process and apparatus for producing crystalline thin film buffer layers and structures having biaxial texture

Details for Australian Patent Application No. 2002302168 (hide)

Owner Commonwealth Scientific and Industrial Research Organisation

Inventors Katsaros, Alex; Savvides, Nicholas; Gnanarajan, Sabaratnasingam

Agent FB Rice

Pub. Number AU-B-2002302168

PCT Number PCT/AU02/00641

PCT Pub. Number WO2002/095084

Priority PR 5153 22.05.01 AU

Filing date 22 May 2002

Wipo publication date 3 December 2002

Acceptance publication date 8 November 2007

International Classifications

C30B 29/22 (2006.01) Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C23C 14/08 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Oxides

C23C 14/48 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Ion implantation

C30B 23/02 (2006.01) Single-crystal growth from vapours - Epitaxial-layer growth

H01L 39/24 (2006.01) Devices using superconductivity or hyperconductivity - Processes or apparatus specially adapted for the manufacture or treatment of devices provided for in group or of parts thereof

C23C 14/34 (2006.01) Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

12 December 2002 Complete Application Filed

  Priority application(s): PR 5153 22.05.01 AU

8 May 2003 Application Open to Public Inspection

  Published as AU-B-2002302168

8 November 2007 Application Accepted

  Published as AU-B-2002302168

6 March 2008 Standard Patent Sealed

18 December 2008 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This patent ceased under section 143(a), or Expired. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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