E-Beam/Microwave Gas Jet PECVD Method and Apparatus for Depositing and/or Surface Modification of Thin Film Materials

Details for Australian Patent Application No. 2002301168 (hide)

Event Publications

5 December 2002 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

Application withdrawn under section 141(1). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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