METHOD FOR FABRICATING WAVEGUIDES

Details for Australian Patent Application No. 2002259294 (hide)

Owner APPLIED MATERIALS, INC.

Inventors MAYDAN, Dan; SAMOILOV, Arkadii, V.

Pub. Number AU-A-2002259294

PCT Pub. Number WO2002/095092

Priority 09/866,172 24.05.01 US

Filing date 24 May 2002

Wipo publication date 3 December 2002

International Classifications

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

C30B 025/14 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Feed and outlet means for the gases

C30B 025/22 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth

C30B 029/10 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape - Inorganic compounds or compositions

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002259294

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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