DIFFERENTIAL CLEANING FOR SEMICONDUCTOR WAFERS WITH COPPER CIRCUITRY

Details for Australian Patent Application No. 2002259236 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors QUARANTELLO, Justin, M.

Pub. Number AU-A-2002259236

PCT Pub. Number WO2002/095813

Priority 09/862,657 21.05.01 US

Filing date 16 May 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B08B 003/00 Cleaning by methods involving the use or presence of liquid or steam

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002259236

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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