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Details for Australian Patent Application No. 2002259208 (hide)

Owner AXCELIS TECHNOLOGIES, INC.

Inventors HAN, Qingyuan; SAKTHIVEL, Palani; WALDFRIED, Carlo; BERRY, Ivan; ESCORCIA, Orlando

Pub. Number AU-A-2002259208

PCT Pub. Number WO2002/093634

Priority 09/855,177 14.05.01 US

Filing date 14 May 2002

Wipo publication date 25 November 2002

International Classifications

H01L 021/311 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002259208

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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