UNIVERSAL BACKPLANE ASSEMBLY AND METHODS

Details for Australian Patent Application No. 2002259056 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors CALDWELL, Doug; GARCIA, Albert, Jr.; HORBACK, Thomas, J.; LOMBARDI, Michael, James; MCNICHOLAS, Mark; MIZE, Dean; WANG, Gon

Pub. Number AU-A-2002259056

PCT Pub. Number WO2002/095806

Priority 09/861,322 18.05.01 US

Filing date 29 April 2002

Wipo publication date 3 December 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002259056

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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