USE OF A GETTERING AGENT IN A CHEMICAL MECHANICAL POLISHING AND RINSING OPERATION AND APPARATUS THEREFOR

Details for Australian Patent Application No. 2002258966 (hide)

Owner ADVANCED MICRO DEVICES, INC.

Inventors MARKLE, Richard, J.

Pub. Number AU-A-2002258966

PCT Pub. Number WO2002/100963

Priority 09/881,086 13.06.01 US

Filing date 2 April 2002

Wipo publication date 23 December 2002

International Classifications

C09G 001/02 Polishing compositions

C11D 003/00 Other compounding ingredients of detergent compositions covered in group

C23F 001/18 Etching metallic material by chemical means

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002258966

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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