SEMICONDUCTOR STRUCTURE INCLUDING A MONOCRYSTALLINE COMPOUND SEMICONDUCTOR LAYER

Details for Australian Patent Application No. 2002258831 (hide)

Owner MOTOROLA, INC.

Inventors DROOPAD, Ravindranath; YU, Zhiyi; OVERGAARD, Corey

Pub. Number AU-A-2002258831

PCT Pub. Number WO2003/009354

Priority 09/905,098 16.07.01 US

Filing date 17 April 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/20 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C30B 029/40 Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape

C30B 025/20 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth

C30B 023/02 Single-crystal growth from vapours - Epitaxial-layer growth

C30B 025/02 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth - Epitaxial-layer growth

Event Publications

22 May 2003 Application Open to Public Inspection

  Published as AU-A-2002258831

8 April 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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