LATERAL NANOSTRUCTURES BY VERTICAL PROCESSING

Details for Australian Patent Application No. 2002258651 (hide)

Owner THE PENN STATE RESEARCH FOUNDATION

Inventors JACKSON, Thomas, N.

Pub. Number AU-A-2002258651

PCT Pub. Number WO2002/080262

Priority 60/280,235 30.03.01 US

Filing date 29 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/4763 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002258651

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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