Owner VEECO INSTRUMENTS, INC.

Inventors SU, Chanmin; MASSIE, James, R.; BABCOCK, Kenneth, L.; TURNER, Mary, G.; PRATER, Craig; MEYER, Charles, R.

Pub. Number AU-A-2002258581

PCT Pub. Number WO2003/038409

Priority 09/999,681 30.10.01 US

Filing date 20 March 2002

Wipo publication date 12 May 2003

G01N 021/00 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light

G01L 001/24 Measuring force or stress, in general - by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis

H01J 037/252 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Tubes for spot-analysing by electron or ion beams

G01N 021/86 Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light - Investigating moving sheets

G01N 029/02 Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves - Analysing fluids

G01N 007/00 Analysing materials by measuring the pressure or volume of a gas or vapour

G01P 015/08 Measuring acceleration - with conversion into electric or magnetic values

G01L 001/04 Measuring force or stress, in general - by measuring elastic deformation of gauges, e.g. of springs