METHOD AND SYSTEM TO ACHIEVE THERMAL TRANSFER BETWEEN A WORKPIECE AND A HEATED BODY DISPOSED IN A CHAMBER

Details for Australian Patent Application No. 2002258517 (hide)

Owner APPLIED MATERIALS, INC.

Inventors TROST, David; CHILESE, Francis, C.

Pub. Number AU-A-2002258517

PCT Pub. Number WO2002/086951

Priority 09/838,126 20.04.01 US

Filing date 13 March 2002

Wipo publication date 5 November 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002258517

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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