OBSERVATION DEVICE USING LIGHT AND X-RAY, EXPOSURE SYSTEM AND EXPOSURE METHOD

Details for Australian Patent Application No. 2002258233 (hide)

Owner HAMAMATSU PHOTONICS K.K.

Inventors NAGAI, Tsutomu; SUZUKI, Tomoyuki

Pub. Number AU-A-2002258233

PCT Pub. Number WO2002/097366

Priority 2001-157436 25.05.01 JP

Filing date 24 May 2002

Wipo publication date 9 December 2002

International Classifications

G01B 015/00 Measuring arrangements characterised by the use of wave or particle radiation

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01B 011/00 Measuring arrangements characterised by the use of optical means

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002258233

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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