SPUTTERING MAGNETRON ARRANGEMENTS WITH ADJUSTABLE MAGNETIC FIELD STRENGTH

Details for Australian Patent Application No. 2002257761 (hide)

Owner N.V. BEKAERT S.A.

Inventors DE BOSSCHER, Wilmert, Cyriel, Stefaan; LAMMENS, Jean-Paul; BROCHE, Ronny; GOBIN, Guy; BLONDEEL, Anja, G., J.

Pub. Number AU-A-2002257761

PCT Pub. Number WO2003/015124

Priority 0118803.6 02.08.01 GB

Filing date 5 April 2002

Wipo publication date 24 February 2003

International Classifications

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

C23C 014/35 Coating by vacuum evaporation, by sputtering or by ion implantation - by application of a magnetic field, e.g. magnetron sputtering

Event Publications

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002257761

6 May 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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