METHOD FOR MAKING A MICROSTRUCTURE BY SURFACE MICROMACHINING

Details for Australian Patent Application No. 2002257193 (hide)

Owner MEMX, INC.

Inventors RODGERS, M., Steven; SNIEGOWSKI, Jeffry, J.

Pub. Number AU-A-2002257193

PCT Pub. Number WO2002/086956

Priority 09/840,716 23.04.01 US

Filing date 22 April 2002

Wipo publication date 5 November 2002

International Classifications

H01L 021/302 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/304 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002257193

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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