CYCLIC ERROR REDUCTION IN AVERAGE INTERFEROMETRIC POSITION MEASUREMENTS

Details for Australian Patent Application No. 2002257034 (hide)

Owner ZYGO CORPORATION

Inventors HILL, Henry, A.

Pub. Number AU-A-2002257034

PCT Pub. Number WO2002/073122

Priority 60/275,599 13.03.01 US

Filing date 13 March 2002

Wipo publication date 24 September 2002

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002257034

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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