MICRO-ELECTRO-MECHANICAL SYSTEMS PACKAGING

Details for Australian Patent Application No. 2002257013 (hide)

Owner NANO STORAGE PTE LTD

Inventors WEST, Glenn, S.; ALAI, Aijay, Babulal; CHEMATA, Venkata, Pavanpratap

Pub. Number AU-A-2002257013

PCT Pub. Number WO2003/085732

Filing date 28 February 2002

Wipo publication date 20 October 2003

International Classifications

H01L 023/34 Details of semiconductor or other solid state devices - Arrangements for cooling, heating, ventilating or temperature compensation

H01L 027/20 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including piezo-electric components

H01L 027/14 Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate - including semiconductor components sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation

Event Publications

27 November 2003 Application Open to Public Inspection

  Published as AU-A-2002257013

18 November 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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